JPS5319905B2 - - Google Patents
Info
- Publication number
- JPS5319905B2 JPS5319905B2 JP2988776A JP2988776A JPS5319905B2 JP S5319905 B2 JPS5319905 B2 JP S5319905B2 JP 2988776 A JP2988776 A JP 2988776A JP 2988776 A JP2988776 A JP 2988776A JP S5319905 B2 JPS5319905 B2 JP S5319905B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2988776A JPS52114278A (en) | 1976-03-22 | 1976-03-22 | Fine pattern transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2988776A JPS52114278A (en) | 1976-03-22 | 1976-03-22 | Fine pattern transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52114278A JPS52114278A (en) | 1977-09-24 |
| JPS5319905B2 true JPS5319905B2 (cs) | 1978-06-23 |
Family
ID=12288471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2988776A Granted JPS52114278A (en) | 1976-03-22 | 1976-03-22 | Fine pattern transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52114278A (cs) |
-
1976
- 1976-03-22 JP JP2988776A patent/JPS52114278A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52114278A (en) | 1977-09-24 |