JPS5319726A - Pattern shape measuring unit - Google Patents

Pattern shape measuring unit

Info

Publication number
JPS5319726A
JPS5319726A JP9433076A JP9433076A JPS5319726A JP S5319726 A JPS5319726 A JP S5319726A JP 9433076 A JP9433076 A JP 9433076A JP 9433076 A JP9433076 A JP 9433076A JP S5319726 A JPS5319726 A JP S5319726A
Authority
JP
Japan
Prior art keywords
measuring unit
pattern shape
shape measuring
pattern
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9433076A
Other languages
Japanese (ja)
Inventor
Hiromichi Fukuchi
Yukio Hoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9433076A priority Critical patent/JPS5319726A/en
Publication of JPS5319726A publication Critical patent/JPS5319726A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE: To make it possible to produce a unit at a low price and measure automatically the shape of pattern at a high speed, without requiring a memory of a large capacity.
COPYRIGHT: (C)1978,JPO&Japio
JP9433076A 1976-08-06 1976-08-06 Pattern shape measuring unit Pending JPS5319726A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9433076A JPS5319726A (en) 1976-08-06 1976-08-06 Pattern shape measuring unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9433076A JPS5319726A (en) 1976-08-06 1976-08-06 Pattern shape measuring unit

Publications (1)

Publication Number Publication Date
JPS5319726A true JPS5319726A (en) 1978-02-23

Family

ID=14107260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9433076A Pending JPS5319726A (en) 1976-08-06 1976-08-06 Pattern shape measuring unit

Country Status (1)

Country Link
JP (1) JPS5319726A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5133215A (en) * 1974-09-16 1976-03-22 Nippon Denso Co NENPIHYO JISOCHI

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5133215A (en) * 1974-09-16 1976-03-22 Nippon Denso Co NENPIHYO JISOCHI
JPS5724849B2 (en) * 1974-09-16 1982-05-26

Similar Documents

Publication Publication Date Title
JPS5296517A (en) Memory unit
JPS51147924A (en) Memory unit
JPS51134558A (en) Measuring unit
JPS5247345A (en) Pattern generating equipment
JPS5319726A (en) Pattern shape measuring unit
JPS5327338A (en) Display device displaying contents of memory
JPS5361918A (en) Display device
JPS51126733A (en) Bubble memory characteristic measuring method.
JPS5365018A (en) Character display unit
JPS5339158A (en) Object shape information generating system
JPS5313477A (en) Operating time measuring system for mechanism
JPS52128199A (en) Merchandise supplier
JPS5220076A (en) Dew-point measurement device
JPS51141682A (en) Vickers hardness measuring system
JPS52116037A (en) Program step calculating system
JPS51139218A (en) Memory
JPS5332775A (en) Period comparison circuit
JPS5394137A (en) Magnetic bubble memory
JPS5379499A (en) Electronic display unit
JPS5376639A (en) Memory unit for hysteresis of program
JPS5211989A (en) Cereals moisture meter
JPS51129269A (en) Measuring method of the amount of information
JPS5340237A (en) Associative memory unit
JPS52121186A (en) Sequence controller
JPS5223959A (en) Nicrometer in which a measuring range is made variable