JPS5318615A - Vacuum evaporation of transition metal carbide by hollow cathod discharge - Google Patents

Vacuum evaporation of transition metal carbide by hollow cathod discharge

Info

Publication number
JPS5318615A
JPS5318615A JP9277476A JP9277476A JPS5318615A JP S5318615 A JPS5318615 A JP S5318615A JP 9277476 A JP9277476 A JP 9277476A JP 9277476 A JP9277476 A JP 9277476A JP S5318615 A JPS5318615 A JP S5318615A
Authority
JP
Japan
Prior art keywords
discharge
transition metal
vacuum evaporation
metal carbide
cathod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9277476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5444273B2 (enExample
Inventor
Muneharu Komiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP9277476A priority Critical patent/JPS5318615A/ja
Publication of JPS5318615A publication Critical patent/JPS5318615A/ja
Publication of JPS5444273B2 publication Critical patent/JPS5444273B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9277476A 1976-08-05 1976-08-05 Vacuum evaporation of transition metal carbide by hollow cathod discharge Granted JPS5318615A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9277476A JPS5318615A (en) 1976-08-05 1976-08-05 Vacuum evaporation of transition metal carbide by hollow cathod discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9277476A JPS5318615A (en) 1976-08-05 1976-08-05 Vacuum evaporation of transition metal carbide by hollow cathod discharge

Publications (2)

Publication Number Publication Date
JPS5318615A true JPS5318615A (en) 1978-02-21
JPS5444273B2 JPS5444273B2 (enExample) 1979-12-25

Family

ID=14063759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9277476A Granted JPS5318615A (en) 1976-08-05 1976-08-05 Vacuum evaporation of transition metal carbide by hollow cathod discharge

Country Status (1)

Country Link
JP (1) JPS5318615A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164049A (ja) * 1974-11-28 1976-06-03 Toray Industries Kasadakaseishusokumaruchifuiramentoshi
JPS62280357A (ja) * 1986-05-28 1987-12-05 Yoichi Murayama 電子ビ−ム蒸発イオンプレ−テイングとその装置
WO2003080890A1 (en) * 2002-03-26 2003-10-02 Matsushita Electric Industrial Co., Ltd. Production metod and production device for thin film
JP2019502020A (ja) * 2015-09-28 2019-01-24 フォン アルデンヌ アセット ゲーエムベーハー ウント コー カーゲー 粒子で基板をコーティングする方法及び当該方法を実施するための装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164049A (ja) * 1974-11-28 1976-06-03 Toray Industries Kasadakaseishusokumaruchifuiramentoshi
JPS62280357A (ja) * 1986-05-28 1987-12-05 Yoichi Murayama 電子ビ−ム蒸発イオンプレ−テイングとその装置
WO2003080890A1 (en) * 2002-03-26 2003-10-02 Matsushita Electric Industrial Co., Ltd. Production metod and production device for thin film
JP2019502020A (ja) * 2015-09-28 2019-01-24 フォン アルデンヌ アセット ゲーエムベーハー ウント コー カーゲー 粒子で基板をコーティングする方法及び当該方法を実施するための装置
US10476084B2 (en) 2015-09-28 2019-11-12 VON ARDENNE Asset GmbH & Co. KG Method for substrate coating with particles and device for carrying out the method

Also Published As

Publication number Publication date
JPS5444273B2 (enExample) 1979-12-25

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