JPS5318466B2 - - Google Patents
Info
- Publication number
- JPS5318466B2 JPS5318466B2 JP5746175A JP5746175A JPS5318466B2 JP S5318466 B2 JPS5318466 B2 JP S5318466B2 JP 5746175 A JP5746175 A JP 5746175A JP 5746175 A JP5746175 A JP 5746175A JP S5318466 B2 JPS5318466 B2 JP S5318466B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5746175A JPS51133186A (en) | 1975-05-16 | 1975-05-16 | A high purity gas system of liquid phase crystal growth apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5746175A JPS51133186A (en) | 1975-05-16 | 1975-05-16 | A high purity gas system of liquid phase crystal growth apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51133186A JPS51133186A (en) | 1976-11-18 |
| JPS5318466B2 true JPS5318466B2 (enExample) | 1978-06-15 |
Family
ID=13056304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5746175A Granted JPS51133186A (en) | 1975-05-16 | 1975-05-16 | A high purity gas system of liquid phase crystal growth apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51133186A (enExample) |
-
1975
- 1975-05-16 JP JP5746175A patent/JPS51133186A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51133186A (en) | 1976-11-18 |