|
US6873087B1
(en)
|
1999-10-29 |
2005-03-29 |
Board Of Regents, The University Of Texas System |
High precision orientation alignment and gap control stages for imprint lithography processes
|
|
EP1303792B1
(en)
|
2000-07-16 |
2012-10-03 |
Board Of Regents, The University Of Texas System |
High-resolution overlay alignement methods and systems for imprint lithography
|
|
AU2001277907A1
(en)
|
2000-07-17 |
2002-01-30 |
Board Of Regents, The University Of Texas System |
Method and system of automatic fluid dispensing for imprint lithography processes
|
|
KR101031528B1
(ko)
|
2000-10-12 |
2011-04-27 |
더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 |
실온 저압 마이크로- 및 나노- 임프린트 리소그래피용템플릿
|
|
US6926929B2
(en)
|
2002-07-09 |
2005-08-09 |
Molecular Imprints, Inc. |
System and method for dispensing liquids
|
|
US6900881B2
(en)
|
2002-07-11 |
2005-05-31 |
Molecular Imprints, Inc. |
Step and repeat imprint lithography systems
|
|
US6908861B2
(en)
|
2002-07-11 |
2005-06-21 |
Molecular Imprints, Inc. |
Method for imprint lithography using an electric field
|
|
US7019819B2
(en)
|
2002-11-13 |
2006-03-28 |
Molecular Imprints, Inc. |
Chucking system for modulating shapes of substrates
|
|
US7027156B2
(en)
|
2002-08-01 |
2006-04-11 |
Molecular Imprints, Inc. |
Scatterometry alignment for imprint lithography
|
|
US7070405B2
(en)
|
2002-08-01 |
2006-07-04 |
Molecular Imprints, Inc. |
Alignment systems for imprint lithography
|
|
US6916584B2
(en)
|
2002-08-01 |
2005-07-12 |
Molecular Imprints, Inc. |
Alignment methods for imprint lithography
|
|
US6980282B2
(en)
|
2002-12-11 |
2005-12-27 |
Molecular Imprints, Inc. |
Method for modulating shapes of substrates
|
|
US6871558B2
(en)
|
2002-12-12 |
2005-03-29 |
Molecular Imprints, Inc. |
Method for determining characteristics of substrate employing fluid geometries
|
|
US7122079B2
(en)
|
2004-02-27 |
2006-10-17 |
Molecular Imprints, Inc. |
Composition for an etching mask comprising a silicon-containing material
|
|
US7179396B2
(en)
|
2003-03-25 |
2007-02-20 |
Molecular Imprints, Inc. |
Positive tone bi-layer imprint lithography method
|
|
US7396475B2
(en)
|
2003-04-25 |
2008-07-08 |
Molecular Imprints, Inc. |
Method of forming stepped structures employing imprint lithography
|
|
US7136150B2
(en)
|
2003-09-25 |
2006-11-14 |
Molecular Imprints, Inc. |
Imprint lithography template having opaque alignment marks
|
|
US7090716B2
(en)
|
2003-10-02 |
2006-08-15 |
Molecular Imprints, Inc. |
Single phase fluid imprint lithography method
|
|
US7630067B2
(en)
|
2004-11-30 |
2009-12-08 |
Molecular Imprints, Inc. |
Interferometric analysis method for the manufacture of nano-scale devices
|