JPS53166142U - - Google Patents

Info

Publication number
JPS53166142U
JPS53166142U JP7292677U JP7292677U JPS53166142U JP S53166142 U JPS53166142 U JP S53166142U JP 7292677 U JP7292677 U JP 7292677U JP 7292677 U JP7292677 U JP 7292677U JP S53166142 U JPS53166142 U JP S53166142U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7292677U
Other languages
Japanese (ja)
Other versions
JPS577931Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977072926U priority Critical patent/JPS577931Y2/ja
Publication of JPS53166142U publication Critical patent/JPS53166142U/ja
Application granted granted Critical
Publication of JPS577931Y2 publication Critical patent/JPS577931Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gas Burners (AREA)
  • Air Supply (AREA)
  • Combustion Of Fluid Fuel (AREA)
JP1977072926U 1977-06-03 1977-06-03 Expired JPS577931Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977072926U JPS577931Y2 (enrdf_load_stackoverflow) 1977-06-03 1977-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977072926U JPS577931Y2 (enrdf_load_stackoverflow) 1977-06-03 1977-06-03

Publications (2)

Publication Number Publication Date
JPS53166142U true JPS53166142U (enrdf_load_stackoverflow) 1978-12-26
JPS577931Y2 JPS577931Y2 (enrdf_load_stackoverflow) 1982-02-16

Family

ID=28985077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977072926U Expired JPS577931Y2 (enrdf_load_stackoverflow) 1977-06-03 1977-06-03

Country Status (1)

Country Link
JP (1) JPS577931Y2 (enrdf_load_stackoverflow)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6873087B1 (en) 1999-10-29 2005-03-29 Board Of Regents, The University Of Texas System High precision orientation alignment and gap control stages for imprint lithography processes
US6921615B2 (en) 2000-07-16 2005-07-26 Board Of Regents, The University Of Texas System High-resolution overlay alignment methods for imprint lithography
WO2002006902A2 (en) 2000-07-17 2002-01-24 Board Of Regents, The University Of Texas System Method and system of automatic fluid dispensing for imprint lithography processes
WO2002067055A2 (en) 2000-10-12 2002-08-29 Board Of Regents, The University Of Texas System Template for room temperature, low pressure micro- and nano-imprint lithography
US6926929B2 (en) 2002-07-09 2005-08-09 Molecular Imprints, Inc. System and method for dispensing liquids
US6908861B2 (en) 2002-07-11 2005-06-21 Molecular Imprints, Inc. Method for imprint lithography using an electric field
US6900881B2 (en) 2002-07-11 2005-05-31 Molecular Imprints, Inc. Step and repeat imprint lithography systems
US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US7070405B2 (en) 2002-08-01 2006-07-04 Molecular Imprints, Inc. Alignment systems for imprint lithography
US7027156B2 (en) 2002-08-01 2006-04-11 Molecular Imprints, Inc. Scatterometry alignment for imprint lithography
US6916584B2 (en) 2002-08-01 2005-07-12 Molecular Imprints, Inc. Alignment methods for imprint lithography
US6980282B2 (en) 2002-12-11 2005-12-27 Molecular Imprints, Inc. Method for modulating shapes of substrates
US6871558B2 (en) 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US7122079B2 (en) 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US7179396B2 (en) 2003-03-25 2007-02-20 Molecular Imprints, Inc. Positive tone bi-layer imprint lithography method
US7396475B2 (en) 2003-04-25 2008-07-08 Molecular Imprints, Inc. Method of forming stepped structures employing imprint lithography
US7136150B2 (en) 2003-09-25 2006-11-14 Molecular Imprints, Inc. Imprint lithography template having opaque alignment marks
US7090716B2 (en) 2003-10-02 2006-08-15 Molecular Imprints, Inc. Single phase fluid imprint lithography method
US7630067B2 (en) 2004-11-30 2009-12-08 Molecular Imprints, Inc. Interferometric analysis method for the manufacture of nano-scale devices

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145633U (enrdf_load_stackoverflow) * 1974-10-02 1976-04-03
JPS51118526U (enrdf_load_stackoverflow) * 1975-03-22 1976-09-25

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145633U (enrdf_load_stackoverflow) * 1974-10-02 1976-04-03
JPS51118526U (enrdf_load_stackoverflow) * 1975-03-22 1976-09-25

Also Published As

Publication number Publication date
JPS577931Y2 (enrdf_load_stackoverflow) 1982-02-16

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