JPS5316277U - - Google Patents
Info
- Publication number
- JPS5316277U JPS5316277U JP9758376U JP9758376U JPS5316277U JP S5316277 U JPS5316277 U JP S5316277U JP 9758376 U JP9758376 U JP 9758376U JP 9758376 U JP9758376 U JP 9758376U JP S5316277 U JPS5316277 U JP S5316277U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9758376U JPS5316277U (en) | 1976-07-23 | 1976-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9758376U JPS5316277U (en) | 1976-07-23 | 1976-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5316277U true JPS5316277U (en) | 1978-02-10 |
Family
ID=28707953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9758376U Pending JPS5316277U (en) | 1976-07-23 | 1976-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5316277U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043834A (en) * | 1983-08-20 | 1985-03-08 | Mitsubishi Electric Corp | Washing device for semiconductor wafer |
| JPS6138933U (en) * | 1984-08-06 | 1986-03-11 | 三菱電機株式会社 | Semiconductor wafer cleaning equipment |
| JPS6142834U (en) * | 1984-08-21 | 1986-03-19 | 大日本スクリ−ン製造株式会社 | Wafer cleaning equipment |
| JPS6254765U (en) * | 1985-09-24 | 1987-04-04 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5094660A (en) * | 1973-12-24 | 1975-07-28 |
-
1976
- 1976-07-23 JP JP9758376U patent/JPS5316277U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5094660A (en) * | 1973-12-24 | 1975-07-28 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043834A (en) * | 1983-08-20 | 1985-03-08 | Mitsubishi Electric Corp | Washing device for semiconductor wafer |
| JPS6138933U (en) * | 1984-08-06 | 1986-03-11 | 三菱電機株式会社 | Semiconductor wafer cleaning equipment |
| JPS6142834U (en) * | 1984-08-21 | 1986-03-19 | 大日本スクリ−ン製造株式会社 | Wafer cleaning equipment |
| JPS6254765U (en) * | 1985-09-24 | 1987-04-04 |