JPS5316251U - - Google Patents

Info

Publication number
JPS5316251U
JPS5316251U JP9772176U JP9772176U JPS5316251U JP S5316251 U JPS5316251 U JP S5316251U JP 9772176 U JP9772176 U JP 9772176U JP 9772176 U JP9772176 U JP 9772176U JP S5316251 U JPS5316251 U JP S5316251U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9772176U
Other languages
Japanese (ja)
Other versions
JPS5614097Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976097721U priority Critical patent/JPS5614097Y2/ja
Publication of JPS5316251U publication Critical patent/JPS5316251U/ja
Application granted granted Critical
Publication of JPS5614097Y2 publication Critical patent/JPS5614097Y2/ja
Expired legal-status Critical Current

Links

JP1976097721U 1976-07-22 1976-07-22 Expired JPS5614097Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976097721U JPS5614097Y2 (enExample) 1976-07-22 1976-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976097721U JPS5614097Y2 (enExample) 1976-07-22 1976-07-22

Publications (2)

Publication Number Publication Date
JPS5316251U true JPS5316251U (enExample) 1978-02-10
JPS5614097Y2 JPS5614097Y2 (enExample) 1981-04-02

Family

ID=28708080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976097721U Expired JPS5614097Y2 (enExample) 1976-07-22 1976-07-22

Country Status (1)

Country Link
JP (1) JPS5614097Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9803926B2 (en) 2014-01-28 2017-10-31 Tokyo Electron Limited Support mechanism and substrate processing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502049U (enExample) * 1973-05-04 1975-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502049U (enExample) * 1973-05-04 1975-01-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9803926B2 (en) 2014-01-28 2017-10-31 Tokyo Electron Limited Support mechanism and substrate processing apparatus

Also Published As

Publication number Publication date
JPS5614097Y2 (enExample) 1981-04-02

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