JPS5315837B2 - - Google Patents
Info
- Publication number
- JPS5315837B2 JPS5315837B2 JP4174474A JP4174474A JPS5315837B2 JP S5315837 B2 JPS5315837 B2 JP S5315837B2 JP 4174474 A JP4174474 A JP 4174474A JP 4174474 A JP4174474 A JP 4174474A JP S5315837 B2 JPS5315837 B2 JP S5315837B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4174474A JPS5315837B2 (ja) | 1974-04-16 | 1974-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4174474A JPS5315837B2 (ja) | 1974-04-16 | 1974-04-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50134986A JPS50134986A (ja) | 1975-10-25 |
| JPS5315837B2 true JPS5315837B2 (ja) | 1978-05-27 |
Family
ID=12616921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4174474A Expired JPS5315837B2 (ja) | 1974-04-16 | 1974-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5315837B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD113247A1 (ja) * | 1974-07-31 | 1975-05-20 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926182A (ja) * | 1972-07-04 | 1974-03-08 |
-
1974
- 1974-04-16 JP JP4174474A patent/JPS5315837B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926182A (ja) * | 1972-07-04 | 1974-03-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50134986A (ja) | 1975-10-25 |