JPS5315767A - Shutter of sputter device - Google Patents
Shutter of sputter deviceInfo
- Publication number
- JPS5315767A JPS5315767A JP8911076A JP8911076A JPS5315767A JP S5315767 A JPS5315767 A JP S5315767A JP 8911076 A JP8911076 A JP 8911076A JP 8911076 A JP8911076 A JP 8911076A JP S5315767 A JPS5315767 A JP S5315767A
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- sputter device
- sputter
- plasmas
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the change in the size of plasmas through opening and closing of a shutter by protrusively forming the portions which connect the end part of the shutter.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8911076A JPS5315767A (en) | 1976-07-28 | 1976-07-28 | Shutter of sputter device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8911076A JPS5315767A (en) | 1976-07-28 | 1976-07-28 | Shutter of sputter device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5315767A true JPS5315767A (en) | 1978-02-14 |
Family
ID=13961742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8911076A Pending JPS5315767A (en) | 1976-07-28 | 1976-07-28 | Shutter of sputter device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5315767A (en) |
-
1976
- 1976-07-28 JP JP8911076A patent/JPS5315767A/en active Pending
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