JPS5315767A - Shutter of sputter device - Google Patents

Shutter of sputter device

Info

Publication number
JPS5315767A
JPS5315767A JP8911076A JP8911076A JPS5315767A JP S5315767 A JPS5315767 A JP S5315767A JP 8911076 A JP8911076 A JP 8911076A JP 8911076 A JP8911076 A JP 8911076A JP S5315767 A JPS5315767 A JP S5315767A
Authority
JP
Japan
Prior art keywords
shutter
sputter device
sputter
plasmas
closing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8911076A
Other languages
Japanese (ja)
Inventor
Mitsuaki Horiuchi
Kensuke Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8911076A priority Critical patent/JPS5315767A/en
Publication of JPS5315767A publication Critical patent/JPS5315767A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the change in the size of plasmas through opening and closing of a shutter by protrusively forming the portions which connect the end part of the shutter.
COPYRIGHT: (C)1978,JPO&Japio
JP8911076A 1976-07-28 1976-07-28 Shutter of sputter device Pending JPS5315767A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8911076A JPS5315767A (en) 1976-07-28 1976-07-28 Shutter of sputter device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8911076A JPS5315767A (en) 1976-07-28 1976-07-28 Shutter of sputter device

Publications (1)

Publication Number Publication Date
JPS5315767A true JPS5315767A (en) 1978-02-14

Family

ID=13961742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8911076A Pending JPS5315767A (en) 1976-07-28 1976-07-28 Shutter of sputter device

Country Status (1)

Country Link
JP (1) JPS5315767A (en)

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