JPS53154998U - - Google Patents
Info
- Publication number
- JPS53154998U JPS53154998U JP6126077U JP6126077U JPS53154998U JP S53154998 U JPS53154998 U JP S53154998U JP 6126077 U JP6126077 U JP 6126077U JP 6126077 U JP6126077 U JP 6126077U JP S53154998 U JPS53154998 U JP S53154998U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977061260U JPS5811009Y2 (ja) | 1977-05-12 | 1977-05-12 | イオン源装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977061260U JPS5811009Y2 (ja) | 1977-05-12 | 1977-05-12 | イオン源装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53154998U true JPS53154998U (ja) | 1978-12-05 |
| JPS5811009Y2 JPS5811009Y2 (ja) | 1983-03-01 |
Family
ID=28962442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977061260U Expired JPS5811009Y2 (ja) | 1977-05-12 | 1977-05-12 | イオン源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5811009Y2 (ja) |
-
1977
- 1977-05-12 JP JP1977061260U patent/JPS5811009Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5811009Y2 (ja) | 1983-03-01 |