JPS53153039U - - Google Patents
Info
- Publication number
- JPS53153039U JPS53153039U JP5755077U JP5755077U JPS53153039U JP S53153039 U JPS53153039 U JP S53153039U JP 5755077 U JP5755077 U JP 5755077U JP 5755077 U JP5755077 U JP 5755077U JP S53153039 U JPS53153039 U JP S53153039U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5755077U JPS53153039U (enExample) | 1977-05-09 | 1977-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5755077U JPS53153039U (enExample) | 1977-05-09 | 1977-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53153039U true JPS53153039U (enExample) | 1978-12-01 |
Family
ID=28955532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5755077U Pending JPS53153039U (enExample) | 1977-05-09 | 1977-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53153039U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5864021A (ja) * | 1981-10-14 | 1983-04-16 | Hitachi Ltd | 連続製膜装置 |
-
1977
- 1977-05-09 JP JP5755077U patent/JPS53153039U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5864021A (ja) * | 1981-10-14 | 1983-04-16 | Hitachi Ltd | 連続製膜装置 |