JPS5315236B2 - - Google Patents
Info
- Publication number
- JPS5315236B2 JPS5315236B2 JP10470473A JP10470473A JPS5315236B2 JP S5315236 B2 JPS5315236 B2 JP S5315236B2 JP 10470473 A JP10470473 A JP 10470473A JP 10470473 A JP10470473 A JP 10470473A JP S5315236 B2 JPS5315236 B2 JP S5315236B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10470473A JPS5315236B2 (ko) | 1973-09-17 | 1973-09-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10470473A JPS5315236B2 (ko) | 1973-09-17 | 1973-09-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5054994A JPS5054994A (ko) | 1975-05-14 |
JPS5315236B2 true JPS5315236B2 (ko) | 1978-05-23 |
Family
ID=14387857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10470473A Expired JPS5315236B2 (ko) | 1973-09-17 | 1973-09-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5315236B2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100246963B1 (ko) * | 1996-11-22 | 2000-03-15 | 윤종용 | 반도체 제조장치의 웨이퍼 홀더용 스테이지 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5851066A (ja) * | 1981-09-17 | 1983-03-25 | Tipton Mfg Corp | 全自動円筒バレル研磨機 |
-
1973
- 1973-09-17 JP JP10470473A patent/JPS5315236B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100246963B1 (ko) * | 1996-11-22 | 2000-03-15 | 윤종용 | 반도체 제조장치의 웨이퍼 홀더용 스테이지 |
Also Published As
Publication number | Publication date |
---|---|
JPS5054994A (ko) | 1975-05-14 |