JPS5315236B2 - - Google Patents

Info

Publication number
JPS5315236B2
JPS5315236B2 JP10470473A JP10470473A JPS5315236B2 JP S5315236 B2 JPS5315236 B2 JP S5315236B2 JP 10470473 A JP10470473 A JP 10470473A JP 10470473 A JP10470473 A JP 10470473A JP S5315236 B2 JPS5315236 B2 JP S5315236B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10470473A
Other languages
Japanese (ja)
Other versions
JPS5054994A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10470473A priority Critical patent/JPS5315236B2/ja
Publication of JPS5054994A publication Critical patent/JPS5054994A/ja
Publication of JPS5315236B2 publication Critical patent/JPS5315236B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP10470473A 1973-09-17 1973-09-17 Expired JPS5315236B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10470473A JPS5315236B2 (enrdf_load_stackoverflow) 1973-09-17 1973-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10470473A JPS5315236B2 (enrdf_load_stackoverflow) 1973-09-17 1973-09-17

Publications (2)

Publication Number Publication Date
JPS5054994A JPS5054994A (enrdf_load_stackoverflow) 1975-05-14
JPS5315236B2 true JPS5315236B2 (enrdf_load_stackoverflow) 1978-05-23

Family

ID=14387857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10470473A Expired JPS5315236B2 (enrdf_load_stackoverflow) 1973-09-17 1973-09-17

Country Status (1)

Country Link
JP (1) JPS5315236B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100246963B1 (ko) * 1996-11-22 2000-03-15 윤종용 반도체 제조장치의 웨이퍼 홀더용 스테이지

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851066A (ja) * 1981-09-17 1983-03-25 Tipton Mfg Corp 全自動円筒バレル研磨機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100246963B1 (ko) * 1996-11-22 2000-03-15 윤종용 반도체 제조장치의 웨이퍼 홀더용 스테이지

Also Published As

Publication number Publication date
JPS5054994A (enrdf_load_stackoverflow) 1975-05-14

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