JPS53148496A - Detecting method and apparatus for impurities - Google Patents
Detecting method and apparatus for impuritiesInfo
- Publication number
- JPS53148496A JPS53148496A JP6351177A JP6351177A JPS53148496A JP S53148496 A JPS53148496 A JP S53148496A JP 6351177 A JP6351177 A JP 6351177A JP 6351177 A JP6351177 A JP 6351177A JP S53148496 A JPS53148496 A JP S53148496A
- Authority
- JP
- Japan
- Prior art keywords
- impurities
- detecting method
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6351177A JPS6049859B2 (en) | 1977-05-31 | 1977-05-31 | Foreign object detection method and device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6351177A JPS6049859B2 (en) | 1977-05-31 | 1977-05-31 | Foreign object detection method and device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53148496A true JPS53148496A (en) | 1978-12-25 |
JPS6049859B2 JPS6049859B2 (en) | 1985-11-05 |
Family
ID=13231313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6351177A Expired JPS6049859B2 (en) | 1977-05-31 | 1977-05-31 | Foreign object detection method and device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6049859B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5799152U (en) * | 1980-12-10 | 1982-06-18 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022074332A (en) | 2020-11-04 | 2022-05-18 | 株式会社ヴィーネックス | Optical line sensor |
-
1977
- 1977-05-31 JP JP6351177A patent/JPS6049859B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5799152U (en) * | 1980-12-10 | 1982-06-18 |
Also Published As
Publication number | Publication date |
---|---|
JPS6049859B2 (en) | 1985-11-05 |
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