JPS53144466A - Cold trap apparatus - Google Patents

Cold trap apparatus

Info

Publication number
JPS53144466A
JPS53144466A JP5864177A JP5864177A JPS53144466A JP S53144466 A JPS53144466 A JP S53144466A JP 5864177 A JP5864177 A JP 5864177A JP 5864177 A JP5864177 A JP 5864177A JP S53144466 A JPS53144466 A JP S53144466A
Authority
JP
Japan
Prior art keywords
cold trap
trap apparatus
thraugh
simplifies
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5864177A
Other languages
Japanese (ja)
Inventor
Tomihiro Ueda
Fumio Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5864177A priority Critical patent/JPS53144466A/en
Publication of JPS53144466A publication Critical patent/JPS53144466A/en
Pending legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

PURPOSE: To provide a cold trap apparatus which simplifies the mechanism and allows the air tightness to be kept high by differentially driving two valves within an intermediate chamber thraugh integration with the drive mechanism of a scraping blade.
COPYRIGHT: (C)1978,JPO&Japio
JP5864177A 1977-05-23 1977-05-23 Cold trap apparatus Pending JPS53144466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5864177A JPS53144466A (en) 1977-05-23 1977-05-23 Cold trap apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5864177A JPS53144466A (en) 1977-05-23 1977-05-23 Cold trap apparatus

Publications (1)

Publication Number Publication Date
JPS53144466A true JPS53144466A (en) 1978-12-15

Family

ID=13090196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5864177A Pending JPS53144466A (en) 1977-05-23 1977-05-23 Cold trap apparatus

Country Status (1)

Country Link
JP (1) JPS53144466A (en)

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