JPS53144099A - Wafer chucking jtg - Google Patents

Wafer chucking jtg

Info

Publication number
JPS53144099A
JPS53144099A JP5867577A JP5867577A JPS53144099A JP S53144099 A JPS53144099 A JP S53144099A JP 5867577 A JP5867577 A JP 5867577A JP 5867577 A JP5867577 A JP 5867577A JP S53144099 A JPS53144099 A JP S53144099A
Authority
JP
Japan
Prior art keywords
jtg
wafer chucking
chucking
wafer
chucking jtg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5867577A
Other languages
Japanese (ja)
Other versions
JPS5547451B2 (en
Inventor
Yukio Murakawa
Keiichi Nagasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP5867577A priority Critical patent/JPS53144099A/en
Publication of JPS53144099A publication Critical patent/JPS53144099A/en
Publication of JPS5547451B2 publication Critical patent/JPS5547451B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP5867577A 1977-05-23 1977-05-23 Wafer chucking jtg Granted JPS53144099A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5867577A JPS53144099A (en) 1977-05-23 1977-05-23 Wafer chucking jtg

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5867577A JPS53144099A (en) 1977-05-23 1977-05-23 Wafer chucking jtg

Publications (2)

Publication Number Publication Date
JPS53144099A true JPS53144099A (en) 1978-12-15
JPS5547451B2 JPS5547451B2 (en) 1980-11-29

Family

ID=13091144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5867577A Granted JPS53144099A (en) 1977-05-23 1977-05-23 Wafer chucking jtg

Country Status (1)

Country Link
JP (1) JPS53144099A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118745U (en) * 1982-02-04 1983-08-13 日本電子株式会社 semiconductor wafer holder
JPS59229835A (en) * 1983-05-13 1984-12-24 Rohm Co Ltd Wafer holding jig
JPS637204A (en) * 1986-05-16 1988-01-13 シリコン・バレ−・グル−プ・インコ−ポレイテツド Balancing mechanism for movable jaw chuck of spin station
JPH0350050U (en) * 1989-09-25 1991-05-15

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118745U (en) * 1982-02-04 1983-08-13 日本電子株式会社 semiconductor wafer holder
JPS59229835A (en) * 1983-05-13 1984-12-24 Rohm Co Ltd Wafer holding jig
JPS6245695B2 (en) * 1983-05-13 1987-09-28 Rohm Kk
JPS637204A (en) * 1986-05-16 1988-01-13 シリコン・バレ−・グル−プ・インコ−ポレイテツド Balancing mechanism for movable jaw chuck of spin station
JPH0350050U (en) * 1989-09-25 1991-05-15
JPH0523570Y2 (en) * 1989-09-25 1993-06-16

Also Published As

Publication number Publication date
JPS5547451B2 (en) 1980-11-29

Similar Documents

Publication Publication Date Title
JPS5689405A (en) Chuck device
JPS5398581A (en) Selfflocking chuck
GB2000456A (en) Clamping chucks
JPS5633208A (en) Chuck
JPS5281679A (en) Chuck
GB2009074A (en) Wafer transfer apparatus
JPS53113380A (en) Chuck
JPS5460874A (en) Wafer
JPS53148283A (en) Silicon wafer jig
GB2001724B (en) Vacuum chucks
GB1557345A (en) Chuck
JPS5264078A (en) Chuck
JPS5245942A (en) Hand microscope
JPS53112683A (en) Semiconductor
JPS53144099A (en) Wafer chucking jtg
GB2003408B (en) Chuck key
JPS5474579A (en) Rapid action chuck
GB1549258A (en) Chucks
JPS5456206A (en) Chuck device
JPS53142183A (en) Silicon wafer jig
JPS5380876A (en) Chuck
JPS5322254A (en) Chuck
JPS5297485A (en) Chuck
JPS53100458A (en) Chuck device
JPS5487602A (en) Chuck apparatus