JPS5314348B2 - - Google Patents

Info

Publication number
JPS5314348B2
JPS5314348B2 JP8594972A JP8594972A JPS5314348B2 JP S5314348 B2 JPS5314348 B2 JP S5314348B2 JP 8594972 A JP8594972 A JP 8594972A JP 8594972 A JP8594972 A JP 8594972A JP S5314348 B2 JPS5314348 B2 JP S5314348B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8594972A
Other languages
Japanese (ja)
Other versions
JPS4941075A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8594972A priority Critical patent/JPS5314348B2/ja
Publication of JPS4941075A publication Critical patent/JPS4941075A/ja
Publication of JPS5314348B2 publication Critical patent/JPS5314348B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Physical Vapour Deposition (AREA)
JP8594972A 1972-08-28 1972-08-28 Expired JPS5314348B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8594972A JPS5314348B2 (https=) 1972-08-28 1972-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8594972A JPS5314348B2 (https=) 1972-08-28 1972-08-28

Publications (2)

Publication Number Publication Date
JPS4941075A JPS4941075A (https=) 1974-04-17
JPS5314348B2 true JPS5314348B2 (https=) 1978-05-17

Family

ID=13872999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8594972A Expired JPS5314348B2 (https=) 1972-08-28 1972-08-28

Country Status (1)

Country Link
JP (1) JPS5314348B2 (https=)

Also Published As

Publication number Publication date
JPS4941075A (https=) 1974-04-17

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