JPS5314193B2 - - Google Patents
Info
- Publication number
- JPS5314193B2 JPS5314193B2 JP3557972A JP3557972A JPS5314193B2 JP S5314193 B2 JPS5314193 B2 JP S5314193B2 JP 3557972 A JP3557972 A JP 3557972A JP 3557972 A JP3557972 A JP 3557972A JP S5314193 B2 JPS5314193 B2 JP S5314193B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3557972A JPS5314193B2 (en) | 1972-04-07 | 1972-04-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3557972A JPS5314193B2 (en) | 1972-04-07 | 1972-04-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS48102975A JPS48102975A (en) | 1973-12-24 |
JPS5314193B2 true JPS5314193B2 (en) | 1978-05-16 |
Family
ID=12445663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3557972A Expired JPS5314193B2 (en) | 1972-04-07 | 1972-04-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5314193B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5391659A (en) * | 1977-01-20 | 1978-08-11 | Hitachi Ltd | Manufacture for semiconductor device |
JPS5521121A (en) * | 1978-08-02 | 1980-02-15 | Hitachi Ltd | Manufacturing method for transistor |
JPS57117253A (en) * | 1981-01-14 | 1982-07-21 | Toshiba Corp | Manufacture of semiconductor device |
KR20180006891A (en) * | 2015-04-28 | 2018-01-19 | 카릿토 홀딩스 가부시키가이샤 | An optical member made of a silicon material and an optical device having such an optical member |
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1972
- 1972-04-07 JP JP3557972A patent/JPS5314193B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS48102975A (en) | 1973-12-24 |