JPS5314171A - Pulling up device for single crystal - Google Patents

Pulling up device for single crystal

Info

Publication number
JPS5314171A
JPS5314171A JP8820276A JP8820276A JPS5314171A JP S5314171 A JPS5314171 A JP S5314171A JP 8820276 A JP8820276 A JP 8820276A JP 8820276 A JP8820276 A JP 8820276A JP S5314171 A JPS5314171 A JP S5314171A
Authority
JP
Japan
Prior art keywords
pulling
single crystal
load cell
cell
dipping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8820276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS544711B2 (enrdf_load_stackoverflow
Inventor
Tokumi Fukazawa
Kazumasa Takagi
Mitsuru Ishii
Fumio Nitanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8820276A priority Critical patent/JPS5314171A/ja
Publication of JPS5314171A publication Critical patent/JPS5314171A/ja
Publication of JPS544711B2 publication Critical patent/JPS544711B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8820276A 1976-07-26 1976-07-26 Pulling up device for single crystal Granted JPS5314171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8820276A JPS5314171A (en) 1976-07-26 1976-07-26 Pulling up device for single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8820276A JPS5314171A (en) 1976-07-26 1976-07-26 Pulling up device for single crystal

Publications (2)

Publication Number Publication Date
JPS5314171A true JPS5314171A (en) 1978-02-08
JPS544711B2 JPS544711B2 (enrdf_load_stackoverflow) 1979-03-09

Family

ID=13936301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8820276A Granted JPS5314171A (en) 1976-07-26 1976-07-26 Pulling up device for single crystal

Country Status (1)

Country Link
JP (1) JPS5314171A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128685A (enrdf_load_stackoverflow) * 1974-03-29 1975-10-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128685A (enrdf_load_stackoverflow) * 1974-03-29 1975-10-09

Also Published As

Publication number Publication date
JPS544711B2 (enrdf_load_stackoverflow) 1979-03-09

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