JPS5314118Y2 - - Google Patents

Info

Publication number
JPS5314118Y2
JPS5314118Y2 JP561473U JP561473U JPS5314118Y2 JP S5314118 Y2 JPS5314118 Y2 JP S5314118Y2 JP 561473 U JP561473 U JP 561473U JP 561473 U JP561473 U JP 561473U JP S5314118 Y2 JPS5314118 Y2 JP S5314118Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP561473U
Other languages
Japanese (ja)
Other versions
JPS49108376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP561473U priority Critical patent/JPS5314118Y2/ja
Publication of JPS49108376U publication Critical patent/JPS49108376U/ja
Application granted granted Critical
Publication of JPS5314118Y2 publication Critical patent/JPS5314118Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP561473U 1973-01-09 1973-01-09 Expired JPS5314118Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP561473U JPS5314118Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-01-09 1973-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP561473U JPS5314118Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-01-09 1973-01-09

Publications (2)

Publication Number Publication Date
JPS49108376U JPS49108376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-09-17
JPS5314118Y2 true JPS5314118Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-04-15

Family

ID=28068713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP561473U Expired JPS5314118Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-01-09 1973-01-09

Country Status (1)

Country Link
JP (1) JPS5314118Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818340Y2 (ja) * 1976-09-24 1983-04-14 株式会社東芝 レ−ザトリミング装置
JPS5818003B2 (ja) * 1976-09-24 1983-04-11 株式会社東芝 レ−ザトリミング装置

Also Published As

Publication number Publication date
JPS49108376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-09-17

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