JPS531402B2 - - Google Patents

Info

Publication number
JPS531402B2
JPS531402B2 JP8623372A JP8623372A JPS531402B2 JP S531402 B2 JPS531402 B2 JP S531402B2 JP 8623372 A JP8623372 A JP 8623372A JP 8623372 A JP8623372 A JP 8623372A JP S531402 B2 JPS531402 B2 JP S531402B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8623372A
Other languages
Japanese (ja)
Other versions
JPS4947976A (US07935154-20110503-C00018.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8623372A priority Critical patent/JPS531402B2/ja
Publication of JPS4947976A publication Critical patent/JPS4947976A/ja
Publication of JPS531402B2 publication Critical patent/JPS531402B2/ja
Expired legal-status Critical Current

Links

JP8623372A 1972-08-30 1972-08-30 Expired JPS531402B2 (US07935154-20110503-C00018.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8623372A JPS531402B2 (US07935154-20110503-C00018.png) 1972-08-30 1972-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8623372A JPS531402B2 (US07935154-20110503-C00018.png) 1972-08-30 1972-08-30

Publications (2)

Publication Number Publication Date
JPS4947976A JPS4947976A (US07935154-20110503-C00018.png) 1974-05-09
JPS531402B2 true JPS531402B2 (US07935154-20110503-C00018.png) 1978-01-19

Family

ID=13881060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8623372A Expired JPS531402B2 (US07935154-20110503-C00018.png) 1972-08-30 1972-08-30

Country Status (1)

Country Link
JP (1) JPS531402B2 (US07935154-20110503-C00018.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5758332A (en) * 1980-09-24 1982-04-08 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS4947976A (US07935154-20110503-C00018.png) 1974-05-09

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