JPS5313986B2 - - Google Patents
Info
- Publication number
- JPS5313986B2 JPS5313986B2 JP12577775A JP12577775A JPS5313986B2 JP S5313986 B2 JPS5313986 B2 JP S5313986B2 JP 12577775 A JP12577775 A JP 12577775A JP 12577775 A JP12577775 A JP 12577775A JP S5313986 B2 JPS5313986 B2 JP S5313986B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12577775A JPS5249879A (en) | 1975-10-18 | 1975-10-18 | Inspection device for photoelectric defect inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12577775A JPS5249879A (en) | 1975-10-18 | 1975-10-18 | Inspection device for photoelectric defect inspection apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5249879A JPS5249879A (en) | 1977-04-21 |
| JPS5313986B2 true JPS5313986B2 (enExample) | 1978-05-13 |
Family
ID=14918570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12577775A Granted JPS5249879A (en) | 1975-10-18 | 1975-10-18 | Inspection device for photoelectric defect inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5249879A (enExample) |
-
1975
- 1975-10-18 JP JP12577775A patent/JPS5249879A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5249879A (en) | 1977-04-21 |