JPS53139462A - Field radiation type electronic gun - Google Patents

Field radiation type electronic gun

Info

Publication number
JPS53139462A
JPS53139462A JP5318277A JP5318277A JPS53139462A JP S53139462 A JPS53139462 A JP S53139462A JP 5318277 A JP5318277 A JP 5318277A JP 5318277 A JP5318277 A JP 5318277A JP S53139462 A JPS53139462 A JP S53139462A
Authority
JP
Japan
Prior art keywords
field radiation
type electronic
radiation type
electronic gun
gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5318277A
Other languages
Japanese (ja)
Inventor
Tadashi Otaka
Yoshio Hokotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5318277A priority Critical patent/JPS53139462A/en
Publication of JPS53139462A publication Critical patent/JPS53139462A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To continue the stabilize field radiation for a long time by reducing extremely the lowering of the vacuum degree near the field radiation chip by means of the plate-type non-evaporation getter pump.
COPYRIGHT: (C)1978,JPO&Japio
JP5318277A 1977-05-11 1977-05-11 Field radiation type electronic gun Pending JPS53139462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5318277A JPS53139462A (en) 1977-05-11 1977-05-11 Field radiation type electronic gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5318277A JPS53139462A (en) 1977-05-11 1977-05-11 Field radiation type electronic gun

Publications (1)

Publication Number Publication Date
JPS53139462A true JPS53139462A (en) 1978-12-05

Family

ID=12935719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5318277A Pending JPS53139462A (en) 1977-05-11 1977-05-11 Field radiation type electronic gun

Country Status (1)

Country Link
JP (1) JPS53139462A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5021702A (en) * 1986-08-20 1991-06-04 Kabushiki Kaisha Toshiba Electron beam apparatus including a plurality of ion pump blocks
JP2010010125A (en) * 2008-05-28 2010-01-14 Hitachi High-Technologies Corp Charged particle beam apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124362A (en) * 1975-04-23 1976-10-29 Hitachi Ltd Field emission type electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124362A (en) * 1975-04-23 1976-10-29 Hitachi Ltd Field emission type electron gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5021702A (en) * 1986-08-20 1991-06-04 Kabushiki Kaisha Toshiba Electron beam apparatus including a plurality of ion pump blocks
JP2010010125A (en) * 2008-05-28 2010-01-14 Hitachi High-Technologies Corp Charged particle beam apparatus

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