JPS53138278U - - Google Patents

Info

Publication number
JPS53138278U
JPS53138278U JP4261477U JP4261477U JPS53138278U JP S53138278 U JPS53138278 U JP S53138278U JP 4261477 U JP4261477 U JP 4261477U JP 4261477 U JP4261477 U JP 4261477U JP S53138278 U JPS53138278 U JP S53138278U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4261477U
Other languages
Japanese (ja)
Other versions
JPS5927952Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977042614U priority Critical patent/JPS5927952Y2/ja
Publication of JPS53138278U publication Critical patent/JPS53138278U/ja
Application granted granted Critical
Publication of JPS5927952Y2 publication Critical patent/JPS5927952Y2/ja
Expired legal-status Critical Current

Links

JP1977042614U 1977-04-07 1977-04-07 ロ−ルフイ−ドの駆動機構 Expired JPS5927952Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977042614U JPS5927952Y2 (ja) 1977-04-07 1977-04-07 ロ−ルフイ−ドの駆動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977042614U JPS5927952Y2 (ja) 1977-04-07 1977-04-07 ロ−ルフイ−ドの駆動機構

Publications (2)

Publication Number Publication Date
JPS53138278U true JPS53138278U (enrdf_load_stackoverflow) 1978-11-01
JPS5927952Y2 JPS5927952Y2 (ja) 1984-08-13

Family

ID=28915451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977042614U Expired JPS5927952Y2 (ja) 1977-04-07 1977-04-07 ロ−ルフイ−ドの駆動機構

Country Status (1)

Country Link
JP (1) JPS5927952Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589241U (ja) * 1981-07-06 1983-01-21 株式会社　アマダ ロ−ルフイ−ド駆動装置
JPS5889138U (ja) * 1981-12-10 1983-06-16 アイダエンジニアリング株式会社 ロ−ルフイ−ドの駆動装置
US7513062B2 (en) 2001-11-02 2009-04-07 Applied Materials, Inc. Single wafer dryer and drying methods

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5130674A (ja) * 1974-09-06 1976-03-16 Aida Eng Ltd Puresunoroorufuiido

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5130674A (ja) * 1974-09-06 1976-03-16 Aida Eng Ltd Puresunoroorufuiido

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589241U (ja) * 1981-07-06 1983-01-21 株式会社　アマダ ロ−ルフイ−ド駆動装置
JPS5889138U (ja) * 1981-12-10 1983-06-16 アイダエンジニアリング株式会社 ロ−ルフイ−ドの駆動装置
US7513062B2 (en) 2001-11-02 2009-04-07 Applied Materials, Inc. Single wafer dryer and drying methods

Also Published As

Publication number Publication date
JPS5927952Y2 (ja) 1984-08-13

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