JPS53134199A - Radioactive gaseous ion implantation system - Google Patents
Radioactive gaseous ion implantation systemInfo
- Publication number
- JPS53134199A JPS53134199A JP4779377A JP4779377A JPS53134199A JP S53134199 A JPS53134199 A JP S53134199A JP 4779377 A JP4779377 A JP 4779377A JP 4779377 A JP4779377 A JP 4779377A JP S53134199 A JPS53134199 A JP S53134199A
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- implantation system
- gaseous ion
- radioactive gaseous
- radioactive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To preform an efficient implantation of radioactive gaseous ions into a metallic foil by condcting the implantaion simultaneously on both faces of the foil.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4779377A JPS53134199A (en) | 1977-04-27 | 1977-04-27 | Radioactive gaseous ion implantation system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4779377A JPS53134199A (en) | 1977-04-27 | 1977-04-27 | Radioactive gaseous ion implantation system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53134199A true JPS53134199A (en) | 1978-11-22 |
Family
ID=12785241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4779377A Pending JPS53134199A (en) | 1977-04-27 | 1977-04-27 | Radioactive gaseous ion implantation system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53134199A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6064070A (en) * | 1997-07-18 | 2000-05-16 | Bruker-Saxonia Analytik Gmbh | Radioactivity ion sources for miniaturized ion mobility spectrometers |
-
1977
- 1977-04-27 JP JP4779377A patent/JPS53134199A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6064070A (en) * | 1997-07-18 | 2000-05-16 | Bruker-Saxonia Analytik Gmbh | Radioactivity ion sources for miniaturized ion mobility spectrometers |
DE19758512C2 (en) * | 1997-07-18 | 2000-06-29 | Bruker Saxonia Analytik Gmbh | Ion-mobility spectrometer |
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