JPS5313340Y2 - - Google Patents
Info
- Publication number
- JPS5313340Y2 JPS5313340Y2 JP7893372U JP7893372U JPS5313340Y2 JP S5313340 Y2 JPS5313340 Y2 JP S5313340Y2 JP 7893372 U JP7893372 U JP 7893372U JP 7893372 U JP7893372 U JP 7893372U JP S5313340 Y2 JPS5313340 Y2 JP S5313340Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7893372U JPS5313340Y2 (en:Method) | 1972-07-04 | 1972-07-04 | |
| US303594A US3890564A (en) | 1972-07-04 | 1972-11-03 | Apparatus for inducing eddy current in a semiconductor wafer for measuring the electric conductivity or resistivity thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7893372U JPS5313340Y2 (en:Method) | 1972-07-04 | 1972-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4936867U JPS4936867U (en:Method) | 1974-04-01 |
| JPS5313340Y2 true JPS5313340Y2 (en:Method) | 1978-04-11 |
Family
ID=27983538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7893372U Expired JPS5313340Y2 (en:Method) | 1972-07-04 | 1972-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5313340Y2 (en:Method) |
-
1972
- 1972-07-04 JP JP7893372U patent/JPS5313340Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4936867U (en:Method) | 1974-04-01 |