JPS5313340Y2 - - Google Patents

Info

Publication number
JPS5313340Y2
JPS5313340Y2 JP7893372U JP7893372U JPS5313340Y2 JP S5313340 Y2 JPS5313340 Y2 JP S5313340Y2 JP 7893372 U JP7893372 U JP 7893372U JP 7893372 U JP7893372 U JP 7893372U JP S5313340 Y2 JPS5313340 Y2 JP S5313340Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7893372U
Other languages
Japanese (ja)
Other versions
JPS4936867U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7893372U priority Critical patent/JPS5313340Y2/ja
Priority to US303594A priority patent/US3890564A/en
Publication of JPS4936867U publication Critical patent/JPS4936867U/ja
Application granted granted Critical
Publication of JPS5313340Y2 publication Critical patent/JPS5313340Y2/ja
Expired legal-status Critical Current

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  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7893372U 1972-07-04 1972-07-04 Expired JPS5313340Y2 (OSRAM)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7893372U JPS5313340Y2 (OSRAM) 1972-07-04 1972-07-04
US303594A US3890564A (en) 1972-07-04 1972-11-03 Apparatus for inducing eddy current in a semiconductor wafer for measuring the electric conductivity or resistivity thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7893372U JPS5313340Y2 (OSRAM) 1972-07-04 1972-07-04

Publications (2)

Publication Number Publication Date
JPS4936867U JPS4936867U (OSRAM) 1974-04-01
JPS5313340Y2 true JPS5313340Y2 (OSRAM) 1978-04-11

Family

ID=27983538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7893372U Expired JPS5313340Y2 (OSRAM) 1972-07-04 1972-07-04

Country Status (1)

Country Link
JP (1) JPS5313340Y2 (OSRAM)

Also Published As

Publication number Publication date
JPS4936867U (OSRAM) 1974-04-01

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