JPS53131888A - Inspection apparatus - Google Patents

Inspection apparatus

Info

Publication number
JPS53131888A
JPS53131888A JP4592477A JP4592477A JPS53131888A JP S53131888 A JPS53131888 A JP S53131888A JP 4592477 A JP4592477 A JP 4592477A JP 4592477 A JP4592477 A JP 4592477A JP S53131888 A JPS53131888 A JP S53131888A
Authority
JP
Japan
Prior art keywords
inspection apparatus
ultrasonic
radiated
correcting
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4592477A
Other languages
Japanese (ja)
Inventor
Shoji Suyama
Seiichi Wakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP4592477A priority Critical patent/JPS53131888A/en
Publication of JPS53131888A publication Critical patent/JPS53131888A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE: To prevent the false detection at the ultrasonic inspection by correcting the directing angles of the ultrasonic beams being radiated, with a mask.
COPYRIGHT: (C)1978,JPO&Japio
JP4592477A 1977-04-22 1977-04-22 Inspection apparatus Pending JPS53131888A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4592477A JPS53131888A (en) 1977-04-22 1977-04-22 Inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4592477A JPS53131888A (en) 1977-04-22 1977-04-22 Inspection apparatus

Publications (1)

Publication Number Publication Date
JPS53131888A true JPS53131888A (en) 1978-11-17

Family

ID=12732798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4592477A Pending JPS53131888A (en) 1977-04-22 1977-04-22 Inspection apparatus

Country Status (1)

Country Link
JP (1) JPS53131888A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131193A (en) * 1973-04-20 1974-12-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131193A (en) * 1973-04-20 1974-12-16

Similar Documents

Publication Publication Date Title
JPS5390872A (en) Optical device
JPS51140488A (en) Mask alignment device
JPS522245A (en) Diagnosis system
JPS527095A (en) Laser work device
JPS52129319A (en) Photographing method of welded area
JPS53131888A (en) Inspection apparatus
JPS5423415A (en) Position variance correcting system
JPS53123957A (en) Position detecting method
JPS5337456A (en) Distance measuring device
JPS53122369A (en) Automatic alignment unit for wafer
JPS5295389A (en) Device for cutting beads on the inner surface of the tube
JPS533177A (en) Tomographic apparatus
JPS53129587A (en) Electron beam exposure unit
JPS53108488A (en) Flaw detector for tubes
JPS51141649A (en) Detecting apparatus for focus matching
JPS53101279A (en) Electron beam exposure device
JPS51129226A (en) Distance measure device
JPS5411680A (en) Exposure unit of electron beam
JPS5438240A (en) Detecting method for position
JPS5437474A (en) Electron beam exposure device
JPS51113060A (en) A bolt set made of a high tensile steel having a good stainless proper ty
JPS527565A (en) Method of and apparatus for stopping object at fixed position
JPS53120464A (en) Monitor for moving body
JPS5425776A (en) Field intensity detector
JPS52104285A (en) Ultrasonic reflectoscope