JPS5312848U - - Google Patents

Info

Publication number
JPS5312848U
JPS5312848U JP4714577U JP4714577U JPS5312848U JP S5312848 U JPS5312848 U JP S5312848U JP 4714577 U JP4714577 U JP 4714577U JP 4714577 U JP4714577 U JP 4714577U JP S5312848 U JPS5312848 U JP S5312848U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4714577U
Other languages
Japanese (ja)
Other versions
JPS5547868Y2 (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977047145U priority Critical patent/JPS5547868Y2/ja
Publication of JPS5312848U publication Critical patent/JPS5312848U/ja
Application granted granted Critical
Publication of JPS5547868Y2 publication Critical patent/JPS5547868Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1977047145U 1977-04-14 1977-04-14 Expired JPS5547868Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977047145U JPS5547868Y2 (no) 1977-04-14 1977-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977047145U JPS5547868Y2 (no) 1977-04-14 1977-04-14

Publications (2)

Publication Number Publication Date
JPS5312848U true JPS5312848U (no) 1978-02-02
JPS5547868Y2 JPS5547868Y2 (no) 1980-11-10

Family

ID=28695106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977047145U Expired JPS5547868Y2 (no) 1977-04-14 1977-04-14

Country Status (1)

Country Link
JP (1) JPS5547868Y2 (no)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512872Y1 (no) * 1965-08-27 1970-06-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512872Y1 (no) * 1965-08-27 1970-06-03

Also Published As

Publication number Publication date
JPS5547868Y2 (no) 1980-11-10

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