JPS5312848U - - Google Patents

Info

Publication number
JPS5312848U
JPS5312848U JP4714577U JP4714577U JPS5312848U JP S5312848 U JPS5312848 U JP S5312848U JP 4714577 U JP4714577 U JP 4714577U JP 4714577 U JP4714577 U JP 4714577U JP S5312848 U JPS5312848 U JP S5312848U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4714577U
Other languages
Japanese (ja)
Other versions
JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977047145U priority Critical patent/JPS5547868Y2/ja
Publication of JPS5312848U publication Critical patent/JPS5312848U/ja
Application granted granted Critical
Publication of JPS5547868Y2 publication Critical patent/JPS5547868Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1977047145U 1977-04-14 1977-04-14 Expired JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977047145U JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-04-14 1977-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977047145U JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-04-14 1977-04-14

Publications (2)

Publication Number Publication Date
JPS5312848U true JPS5312848U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-02-02
JPS5547868Y2 JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-10

Family

ID=28695106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977047145U Expired JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-04-14 1977-04-14

Country Status (1)

Country Link
JP (1) JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512872Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-08-27 1970-06-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512872Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-08-27 1970-06-03

Also Published As

Publication number Publication date
JPS5547868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-10

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