JPS53128353U - - Google Patents

Info

Publication number
JPS53128353U
JPS53128353U JP3331877U JP3331877U JPS53128353U JP S53128353 U JPS53128353 U JP S53128353U JP 3331877 U JP3331877 U JP 3331877U JP 3331877 U JP3331877 U JP 3331877U JP S53128353 U JPS53128353 U JP S53128353U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3331877U
Other languages
Japanese (ja)
Other versions
JPS5617489Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977033318U priority Critical patent/JPS5617489Y2/ja
Publication of JPS53128353U publication Critical patent/JPS53128353U/ja
Application granted granted Critical
Publication of JPS5617489Y2 publication Critical patent/JPS5617489Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1977033318U 1977-03-22 1977-03-22 Expired JPS5617489Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977033318U JPS5617489Y2 (enExample) 1977-03-22 1977-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977033318U JPS5617489Y2 (enExample) 1977-03-22 1977-03-22

Publications (2)

Publication Number Publication Date
JPS53128353U true JPS53128353U (enExample) 1978-10-12
JPS5617489Y2 JPS5617489Y2 (enExample) 1981-04-23

Family

ID=28888552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977033318U Expired JPS5617489Y2 (enExample) 1977-03-22 1977-03-22

Country Status (1)

Country Link
JP (1) JPS5617489Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50139083A (enExample) * 1974-04-26 1975-11-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50139083A (enExample) * 1974-04-26 1975-11-06

Also Published As

Publication number Publication date
JPS5617489Y2 (enExample) 1981-04-23

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