JPS53126564U - - Google Patents

Info

Publication number
JPS53126564U
JPS53126564U JP3239377U JP3239377U JPS53126564U JP S53126564 U JPS53126564 U JP S53126564U JP 3239377 U JP3239377 U JP 3239377U JP 3239377 U JP3239377 U JP 3239377U JP S53126564 U JPS53126564 U JP S53126564U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3239377U
Other languages
Japanese (ja)
Other versions
JPS5633151Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3239377U priority Critical patent/JPS5633151Y2/ja
Publication of JPS53126564U publication Critical patent/JPS53126564U/ja
Application granted granted Critical
Publication of JPS5633151Y2 publication Critical patent/JPS5633151Y2/ja
Expired legal-status Critical Current

Links

JP3239377U 1977-03-17 1977-03-17 Expired JPS5633151Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3239377U JPS5633151Y2 (en) 1977-03-17 1977-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3239377U JPS5633151Y2 (en) 1977-03-17 1977-03-17

Publications (2)

Publication Number Publication Date
JPS53126564U true JPS53126564U (en) 1978-10-07
JPS5633151Y2 JPS5633151Y2 (en) 1981-08-06

Family

ID=28885802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3239377U Expired JPS5633151Y2 (en) 1977-03-17 1977-03-17

Country Status (1)

Country Link
JP (1) JPS5633151Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848935A (en) * 1981-09-18 1983-03-23 Tokyo Ohka Kogyo Co Ltd Automatic plasma processing apparatus
JPH06329215A (en) * 1993-05-17 1994-11-29 Dainippon Screen Mfg Co Ltd Substrate store device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848935A (en) * 1981-09-18 1983-03-23 Tokyo Ohka Kogyo Co Ltd Automatic plasma processing apparatus
JPH06329215A (en) * 1993-05-17 1994-11-29 Dainippon Screen Mfg Co Ltd Substrate store device

Also Published As

Publication number Publication date
JPS5633151Y2 (en) 1981-08-06

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