JPS5312190B2 - - Google Patents
Info
- Publication number
- JPS5312190B2 JPS5312190B2 JP5635972A JP5635972A JPS5312190B2 JP S5312190 B2 JPS5312190 B2 JP S5312190B2 JP 5635972 A JP5635972 A JP 5635972A JP 5635972 A JP5635972 A JP 5635972A JP S5312190 B2 JPS5312190 B2 JP S5312190B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Indicating Measured Values (AREA)
- Details Of Measuring Devices (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5635972A JPS5312190B2 (en:Method) | 1972-06-05 | 1972-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5635972A JPS5312190B2 (en:Method) | 1972-06-05 | 1972-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917749A JPS4917749A (en:Method) | 1974-02-16 |
| JPS5312190B2 true JPS5312190B2 (en:Method) | 1978-04-27 |
Family
ID=13025034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5635972A Expired JPS5312190B2 (en:Method) | 1972-06-05 | 1972-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5312190B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6095419A (ja) * | 1983-10-31 | 1985-05-28 | Canon Inc | 光学走査装置 |
| DE102017107282B4 (de) * | 2017-04-05 | 2021-02-25 | Precitec Gmbh & Co. Kg | Kartesische Positioniervorrichtung und Laserbearbeitungskopf mit derselben |
-
1972
- 1972-06-05 JP JP5635972A patent/JPS5312190B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4917749A (en:Method) | 1974-02-16 |