JPS53120225U - - Google Patents

Info

Publication number
JPS53120225U
JPS53120225U JP2485977U JP2485977U JPS53120225U JP S53120225 U JPS53120225 U JP S53120225U JP 2485977 U JP2485977 U JP 2485977U JP 2485977 U JP2485977 U JP 2485977U JP S53120225 U JPS53120225 U JP S53120225U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2485977U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2485977U priority Critical patent/JPS53120225U/ja
Publication of JPS53120225U publication Critical patent/JPS53120225U/ja
Pending legal-status Critical Current

Links

JP2485977U 1977-03-01 1977-03-01 Pending JPS53120225U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2485977U JPS53120225U (en) 1977-03-01 1977-03-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2485977U JPS53120225U (en) 1977-03-01 1977-03-01

Publications (1)

Publication Number Publication Date
JPS53120225U true JPS53120225U (en) 1978-09-25

Family

ID=28864129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2485977U Pending JPS53120225U (en) 1977-03-01 1977-03-01

Country Status (1)

Country Link
JP (1) JPS53120225U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101053992B1 (en) * 2008-11-18 2011-08-04 세메스 주식회사 Substrate processing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4312778Y1 (en) * 1965-03-20 1968-05-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4312778Y1 (en) * 1965-03-20 1968-05-31

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101053992B1 (en) * 2008-11-18 2011-08-04 세메스 주식회사 Substrate processing apparatus

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