JPS5311957U - - Google Patents
Info
- Publication number
- JPS5311957U JPS5311957U JP9240276U JP9240276U JPS5311957U JP S5311957 U JPS5311957 U JP S5311957U JP 9240276 U JP9240276 U JP 9240276U JP 9240276 U JP9240276 U JP 9240276U JP S5311957 U JPS5311957 U JP S5311957U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9240276U JPS5311957U (en:Method) | 1976-07-13 | 1976-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9240276U JPS5311957U (en:Method) | 1976-07-13 | 1976-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5311957U true JPS5311957U (en:Method) | 1978-01-31 |
Family
ID=28702988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9240276U Pending JPS5311957U (en:Method) | 1976-07-13 | 1976-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311957U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5989535U (ja) * | 1982-12-09 | 1984-06-18 | 株式会社東芝 | 半導体ウエハの洗浄装置 |
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1976
- 1976-07-13 JP JP9240276U patent/JPS5311957U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5989535U (ja) * | 1982-12-09 | 1984-06-18 | 株式会社東芝 | 半導体ウエハの洗浄装置 |