JPS5311957U - - Google Patents

Info

Publication number
JPS5311957U
JPS5311957U JP9240276U JP9240276U JPS5311957U JP S5311957 U JPS5311957 U JP S5311957U JP 9240276 U JP9240276 U JP 9240276U JP 9240276 U JP9240276 U JP 9240276U JP S5311957 U JPS5311957 U JP S5311957U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9240276U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9240276U priority Critical patent/JPS5311957U/ja
Publication of JPS5311957U publication Critical patent/JPS5311957U/ja
Pending legal-status Critical Current

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Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP9240276U 1976-07-13 1976-07-13 Pending JPS5311957U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9240276U JPS5311957U (enrdf_load_stackoverflow) 1976-07-13 1976-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9240276U JPS5311957U (enrdf_load_stackoverflow) 1976-07-13 1976-07-13

Publications (1)

Publication Number Publication Date
JPS5311957U true JPS5311957U (enrdf_load_stackoverflow) 1978-01-31

Family

ID=28702988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9240276U Pending JPS5311957U (enrdf_load_stackoverflow) 1976-07-13 1976-07-13

Country Status (1)

Country Link
JP (1) JPS5311957U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989535U (ja) * 1982-12-09 1984-06-18 株式会社東芝 半導体ウエハの洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989535U (ja) * 1982-12-09 1984-06-18 株式会社東芝 半導体ウエハの洗浄装置

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