JPS5311831B2 - - Google Patents
Info
- Publication number
- JPS5311831B2 JPS5311831B2 JP4754176A JP4754176A JPS5311831B2 JP S5311831 B2 JPS5311831 B2 JP S5311831B2 JP 4754176 A JP4754176 A JP 4754176A JP 4754176 A JP4754176 A JP 4754176A JP S5311831 B2 JPS5311831 B2 JP S5311831B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4754176A JPS52130569A (en) | 1976-04-26 | 1976-04-26 | Preparation of reticle for electron beam exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4754176A JPS52130569A (en) | 1976-04-26 | 1976-04-26 | Preparation of reticle for electron beam exposure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52130569A JPS52130569A (en) | 1977-11-01 |
| JPS5311831B2 true JPS5311831B2 (cs) | 1978-04-25 |
Family
ID=12777991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4754176A Granted JPS52130569A (en) | 1976-04-26 | 1976-04-26 | Preparation of reticle for electron beam exposure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52130569A (cs) |
-
1976
- 1976-04-26 JP JP4754176A patent/JPS52130569A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52130569A (en) | 1977-11-01 |