JPS53117381A - Positive resist - Google Patents
Positive resistInfo
- Publication number
- JPS53117381A JPS53117381A JP3237477A JP3237477A JPS53117381A JP S53117381 A JPS53117381 A JP S53117381A JP 3237477 A JP3237477 A JP 3237477A JP 3237477 A JP3237477 A JP 3237477A JP S53117381 A JPS53117381 A JP S53117381A
- Authority
- JP
- Japan
- Prior art keywords
- positive resist
- resist
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3237477A JPS53117381A (en) | 1977-03-24 | 1977-03-24 | Positive resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3237477A JPS53117381A (en) | 1977-03-24 | 1977-03-24 | Positive resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53117381A true JPS53117381A (en) | 1978-10-13 |
Family
ID=12357160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3237477A Pending JPS53117381A (en) | 1977-03-24 | 1977-03-24 | Positive resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53117381A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH021860A (en) * | 1988-06-13 | 1990-01-08 | Toppan Printing Co Ltd | Radiation sensitive positive type resist high in resolution |
-
1977
- 1977-03-24 JP JP3237477A patent/JPS53117381A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH021860A (en) * | 1988-06-13 | 1990-01-08 | Toppan Printing Co Ltd | Radiation sensitive positive type resist high in resolution |
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JPS53117381A (en) | Positive resist |