JPS53117381A - Positive resist - Google Patents

Positive resist

Info

Publication number
JPS53117381A
JPS53117381A JP3237477A JP3237477A JPS53117381A JP S53117381 A JPS53117381 A JP S53117381A JP 3237477 A JP3237477 A JP 3237477A JP 3237477 A JP3237477 A JP 3237477A JP S53117381 A JPS53117381 A JP S53117381A
Authority
JP
Japan
Prior art keywords
positive resist
resist
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3237477A
Other languages
Japanese (ja)
Inventor
Teizou Kotani
Takashi Inoue
Nobuyuki Wakigi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP3237477A priority Critical patent/JPS53117381A/en
Publication of JPS53117381A publication Critical patent/JPS53117381A/en
Pending legal-status Critical Current

Links

JP3237477A 1977-03-24 1977-03-24 Positive resist Pending JPS53117381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3237477A JPS53117381A (en) 1977-03-24 1977-03-24 Positive resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3237477A JPS53117381A (en) 1977-03-24 1977-03-24 Positive resist

Publications (1)

Publication Number Publication Date
JPS53117381A true JPS53117381A (en) 1978-10-13

Family

ID=12357160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3237477A Pending JPS53117381A (en) 1977-03-24 1977-03-24 Positive resist

Country Status (1)

Country Link
JP (1) JPS53117381A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021860A (en) * 1988-06-13 1990-01-08 Toppan Printing Co Ltd Radiation sensitive positive type resist high in resolution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021860A (en) * 1988-06-13 1990-01-08 Toppan Printing Co Ltd Radiation sensitive positive type resist high in resolution

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JPS53117381A (en) Positive resist