JPS5311628B2 - - Google Patents
Info
- Publication number
- JPS5311628B2 JPS5311628B2 JP5315272A JP5315272A JPS5311628B2 JP S5311628 B2 JPS5311628 B2 JP S5311628B2 JP 5315272 A JP5315272 A JP 5315272A JP 5315272 A JP5315272 A JP 5315272A JP S5311628 B2 JPS5311628 B2 JP S5311628B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Servomotors (AREA)
- Fluid-Pressure Circuits (AREA)
- Control Of Position Or Direction (AREA)
- Control Of Velocity Or Acceleration (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315272A JPS5311628B2 (en:Method) | 1972-05-29 | 1972-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315272A JPS5311628B2 (en:Method) | 1972-05-29 | 1972-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS498675A JPS498675A (en:Method) | 1974-01-25 |
| JPS5311628B2 true JPS5311628B2 (en:Method) | 1978-04-22 |
Family
ID=12934849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5315272A Expired JPS5311628B2 (en:Method) | 1972-05-29 | 1972-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311628B2 (en:Method) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50109083U (en:Method) * | 1974-02-15 | 1975-09-06 | ||
| JPS6018841B2 (ja) * | 1974-07-16 | 1985-05-13 | 株式会社小松製作所 | 建設車輌の作業機の自動制御装置 |
| JPS5114593A (en) * | 1974-07-24 | 1976-02-05 | Komatsu Mfg Co Ltd | Kensetsusharyono shiagebetsujidoseigyosochi |
| JPS5518561Y2 (en:Method) * | 1974-08-06 | 1980-04-30 | ||
| JPS5124479A (en) * | 1974-08-23 | 1976-02-27 | Komatsu Mfg Co Ltd | Shirinda nyoru ichigime hohooyobi sochi |
| JPS5153385U (en:Method) * | 1974-10-22 | 1976-04-23 | ||
| JPS51111592A (en) * | 1975-03-28 | 1976-10-01 | Hitachi Ltd | Stop position controlling system of fluid-pressure actuator |
| JPS5279195A (en) * | 1975-12-26 | 1977-07-04 | Mitsubishi Motors Corp | Piston positional shift regulating controller |
| JPS616327Y2 (en:Method) * | 1976-10-29 | 1986-02-26 | ||
| JPS621001A (ja) * | 1985-06-26 | 1987-01-07 | Kubota Ltd | 作業機の作業装置用駆動制御機構 |
| WO2020059427A1 (ja) * | 2018-09-19 | 2020-03-26 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置及び蓋開閉機構及び半導体装置の製造方法及び流体圧駆動システム |
-
1972
- 1972-05-29 JP JP5315272A patent/JPS5311628B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS498675A (en:Method) | 1974-01-25 |