JPS5311352B2 - - Google Patents
Info
- Publication number
- JPS5311352B2 JPS5311352B2 JP9259773A JP9259773A JPS5311352B2 JP S5311352 B2 JPS5311352 B2 JP S5311352B2 JP 9259773 A JP9259773 A JP 9259773A JP 9259773 A JP9259773 A JP 9259773A JP S5311352 B2 JPS5311352 B2 JP S5311352B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9259773A JPS5311352B2 (https=) | 1973-08-17 | 1973-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9259773A JPS5311352B2 (https=) | 1973-08-17 | 1973-08-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5041470A JPS5041470A (https=) | 1975-04-15 |
| JPS5311352B2 true JPS5311352B2 (https=) | 1978-04-20 |
Family
ID=14058847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9259773A Expired JPS5311352B2 (https=) | 1973-08-17 | 1973-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311352B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6181647A (ja) * | 1985-04-22 | 1986-04-25 | Nec Corp | 半導体ウエハ−検査装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4123701Y1 (https=) * | 1966-02-22 | 1966-12-02 |
-
1973
- 1973-08-17 JP JP9259773A patent/JPS5311352B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5041470A (https=) | 1975-04-15 |