JPS53113072U - - Google Patents
Info
- Publication number
- JPS53113072U JPS53113072U JP1778877U JP1778877U JPS53113072U JP S53113072 U JPS53113072 U JP S53113072U JP 1778877 U JP1778877 U JP 1778877U JP 1778877 U JP1778877 U JP 1778877U JP S53113072 U JPS53113072 U JP S53113072U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977017788U JPS581958Y2 (ja) | 1977-02-15 | 1977-02-15 | イオン源部真空排気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977017788U JPS581958Y2 (ja) | 1977-02-15 | 1977-02-15 | イオン源部真空排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53113072U true JPS53113072U (enExample) | 1978-09-08 |
| JPS581958Y2 JPS581958Y2 (ja) | 1983-01-13 |
Family
ID=28843827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977017788U Expired JPS581958Y2 (ja) | 1977-02-15 | 1977-02-15 | イオン源部真空排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS581958Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4736800U (enExample) * | 1971-05-11 | 1972-12-23 | ||
| JPS5191673A (enExample) * | 1975-01-20 | 1976-08-11 |
-
1977
- 1977-02-15 JP JP1977017788U patent/JPS581958Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4736800U (enExample) * | 1971-05-11 | 1972-12-23 | ||
| JPS5191673A (enExample) * | 1975-01-20 | 1976-08-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS581958Y2 (ja) | 1983-01-13 |