JPS53113072U - - Google Patents

Info

Publication number
JPS53113072U
JPS53113072U JP1778877U JP1778877U JPS53113072U JP S53113072 U JPS53113072 U JP S53113072U JP 1778877 U JP1778877 U JP 1778877U JP 1778877 U JP1778877 U JP 1778877U JP S53113072 U JPS53113072 U JP S53113072U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1778877U
Other languages
Japanese (ja)
Other versions
JPS581958Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977017788U priority Critical patent/JPS581958Y2/ja
Publication of JPS53113072U publication Critical patent/JPS53113072U/ja
Application granted granted Critical
Publication of JPS581958Y2 publication Critical patent/JPS581958Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
JP1977017788U 1977-02-15 1977-02-15 イオン源部真空排気装置 Expired JPS581958Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977017788U JPS581958Y2 (ja) 1977-02-15 1977-02-15 イオン源部真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977017788U JPS581958Y2 (ja) 1977-02-15 1977-02-15 イオン源部真空排気装置

Publications (2)

Publication Number Publication Date
JPS53113072U true JPS53113072U (enrdf_load_stackoverflow) 1978-09-08
JPS581958Y2 JPS581958Y2 (ja) 1983-01-13

Family

ID=28843827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977017788U Expired JPS581958Y2 (ja) 1977-02-15 1977-02-15 イオン源部真空排気装置

Country Status (1)

Country Link
JP (1) JPS581958Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4736800U (enrdf_load_stackoverflow) * 1971-05-11 1972-12-23
JPS5191673A (enrdf_load_stackoverflow) * 1975-01-20 1976-08-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4736800U (enrdf_load_stackoverflow) * 1971-05-11 1972-12-23
JPS5191673A (enrdf_load_stackoverflow) * 1975-01-20 1976-08-11

Also Published As

Publication number Publication date
JPS581958Y2 (ja) 1983-01-13

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