JPS5311237B2 - - Google Patents

Info

Publication number
JPS5311237B2
JPS5311237B2 JP6648472A JP6648472A JPS5311237B2 JP S5311237 B2 JPS5311237 B2 JP S5311237B2 JP 6648472 A JP6648472 A JP 6648472A JP 6648472 A JP6648472 A JP 6648472A JP S5311237 B2 JPS5311237 B2 JP S5311237B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6648472A
Other languages
Japanese (ja)
Other versions
JPS4927279A (el
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6648472A priority Critical patent/JPS5311237B2/ja
Publication of JPS4927279A publication Critical patent/JPS4927279A/ja
Publication of JPS5311237B2 publication Critical patent/JPS5311237B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6648472A 1972-07-03 1972-07-03 Expired JPS5311237B2 (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6648472A JPS5311237B2 (el) 1972-07-03 1972-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6648472A JPS5311237B2 (el) 1972-07-03 1972-07-03

Publications (2)

Publication Number Publication Date
JPS4927279A JPS4927279A (el) 1974-03-11
JPS5311237B2 true JPS5311237B2 (el) 1978-04-20

Family

ID=13317092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6648472A Expired JPS5311237B2 (el) 1972-07-03 1972-07-03

Country Status (1)

Country Link
JP (1) JPS5311237B2 (el)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545487A (en) * 1977-06-13 1979-01-16 Tokyo Optical Surface defect detector

Also Published As

Publication number Publication date
JPS4927279A (el) 1974-03-11

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