JPS5311237B2 - - Google Patents

Info

Publication number
JPS5311237B2
JPS5311237B2 JP6648472A JP6648472A JPS5311237B2 JP S5311237 B2 JPS5311237 B2 JP S5311237B2 JP 6648472 A JP6648472 A JP 6648472A JP 6648472 A JP6648472 A JP 6648472A JP S5311237 B2 JPS5311237 B2 JP S5311237B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6648472A
Other languages
Japanese (ja)
Other versions
JPS4927279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6648472A priority Critical patent/JPS5311237B2/ja
Publication of JPS4927279A publication Critical patent/JPS4927279A/ja
Publication of JPS5311237B2 publication Critical patent/JPS5311237B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6648472A 1972-07-03 1972-07-03 Expired JPS5311237B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6648472A JPS5311237B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-03 1972-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6648472A JPS5311237B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-03 1972-07-03

Publications (2)

Publication Number Publication Date
JPS4927279A JPS4927279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-11
JPS5311237B2 true JPS5311237B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-04-20

Family

ID=13317092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6648472A Expired JPS5311237B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-03 1972-07-03

Country Status (1)

Country Link
JP (1) JPS5311237B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545487A (en) * 1977-06-13 1979-01-16 Tokyo Optical Surface defect detector

Also Published As

Publication number Publication date
JPS4927279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-11

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