JPS5311188B2 - - Google Patents
Info
- Publication number
- JPS5311188B2 JPS5311188B2 JP10859972A JP10859972A JPS5311188B2 JP S5311188 B2 JPS5311188 B2 JP S5311188B2 JP 10859972 A JP10859972 A JP 10859972A JP 10859972 A JP10859972 A JP 10859972A JP S5311188 B2 JPS5311188 B2 JP S5311188B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10859972A JPS5311188B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10859972A JPS5311188B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4967565A JPS4967565A (en:Method) | 1974-07-01 |
| JPS5311188B2 true JPS5311188B2 (en:Method) | 1978-04-19 |
Family
ID=14488874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10859972A Expired JPS5311188B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311188B2 (en:Method) |
-
1972
- 1972-10-30 JP JP10859972A patent/JPS5311188B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4967565A (en:Method) | 1974-07-01 |