JPS53111594A - Method of mounting workpiece on holder - Google Patents
Method of mounting workpiece on holderInfo
- Publication number
- JPS53111594A JPS53111594A JP1883877A JP1883877A JPS53111594A JP S53111594 A JPS53111594 A JP S53111594A JP 1883877 A JP1883877 A JP 1883877A JP 1883877 A JP1883877 A JP 1883877A JP S53111594 A JPS53111594 A JP S53111594A
- Authority
- JP
- Japan
- Prior art keywords
- holder
- workpiece
- mounting workpiece
- grooves
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To attach a workpiece uniformly to a holder with high accuracy by forming grooves in a surface of the holder in a lapping device, putting the workpiece on the surface, and applying a weight load to the workpiece while causing a melted adhesive to soak through the grooves into between the holder and the workpiece.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1883877A JPS53111594A (en) | 1977-02-23 | 1977-02-23 | Method of mounting workpiece on holder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1883877A JPS53111594A (en) | 1977-02-23 | 1977-02-23 | Method of mounting workpiece on holder |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53111594A true JPS53111594A (en) | 1978-09-29 |
JPS6210779B2 JPS6210779B2 (en) | 1987-03-09 |
Family
ID=11982690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1883877A Granted JPS53111594A (en) | 1977-02-23 | 1977-02-23 | Method of mounting workpiece on holder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53111594A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5615973A (en) * | 1979-07-13 | 1981-02-16 | Fujitsu Ltd | Machining method for both faces of tiny thin leaf |
JPS56166151U (en) * | 1980-05-09 | 1981-12-09 | ||
JPH01107309A (en) * | 1987-10-21 | 1989-04-25 | Hitachi Ltd | Lap surface table for magnetic head grinding device |
JPH08329441A (en) * | 1996-06-17 | 1996-12-13 | Hitachi Ltd | Polishing method of floating face of magnetic head slider |
EP1020253A2 (en) * | 1999-01-18 | 2000-07-19 | Shin-Etsu Handotai Co., Ltd | Polishing method for wafer and holding plate |
-
1977
- 1977-02-23 JP JP1883877A patent/JPS53111594A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5615973A (en) * | 1979-07-13 | 1981-02-16 | Fujitsu Ltd | Machining method for both faces of tiny thin leaf |
JPS56166151U (en) * | 1980-05-09 | 1981-12-09 | ||
JPH01107309A (en) * | 1987-10-21 | 1989-04-25 | Hitachi Ltd | Lap surface table for magnetic head grinding device |
JPH08329441A (en) * | 1996-06-17 | 1996-12-13 | Hitachi Ltd | Polishing method of floating face of magnetic head slider |
EP1020253A2 (en) * | 1999-01-18 | 2000-07-19 | Shin-Etsu Handotai Co., Ltd | Polishing method for wafer and holding plate |
EP1020253A3 (en) * | 1999-01-18 | 2001-05-23 | Shin-Etsu Handotai Co., Ltd | Polishing method for wafer and holding plate |
US6402594B1 (en) | 1999-01-18 | 2002-06-11 | Shin-Etsu Handotai Co., Ltd. | Polishing method for wafer and holding plate |
Also Published As
Publication number | Publication date |
---|---|
JPS6210779B2 (en) | 1987-03-09 |
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