JPS53111594A - Method of mounting workpiece on holder - Google Patents

Method of mounting workpiece on holder

Info

Publication number
JPS53111594A
JPS53111594A JP1883877A JP1883877A JPS53111594A JP S53111594 A JPS53111594 A JP S53111594A JP 1883877 A JP1883877 A JP 1883877A JP 1883877 A JP1883877 A JP 1883877A JP S53111594 A JPS53111594 A JP S53111594A
Authority
JP
Japan
Prior art keywords
holder
workpiece
mounting workpiece
grooves
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1883877A
Other languages
Japanese (ja)
Other versions
JPS6210779B2 (en
Inventor
Hisashi Matsumoto
Hiroaki Hatta
Jiro Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1883877A priority Critical patent/JPS53111594A/en
Publication of JPS53111594A publication Critical patent/JPS53111594A/en
Publication of JPS6210779B2 publication Critical patent/JPS6210779B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To attach a workpiece uniformly to a holder with high accuracy by forming grooves in a surface of the holder in a lapping device, putting the workpiece on the surface, and applying a weight load to the workpiece while causing a melted adhesive to soak through the grooves into between the holder and the workpiece.
JP1883877A 1977-02-23 1977-02-23 Method of mounting workpiece on holder Granted JPS53111594A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1883877A JPS53111594A (en) 1977-02-23 1977-02-23 Method of mounting workpiece on holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1883877A JPS53111594A (en) 1977-02-23 1977-02-23 Method of mounting workpiece on holder

Publications (2)

Publication Number Publication Date
JPS53111594A true JPS53111594A (en) 1978-09-29
JPS6210779B2 JPS6210779B2 (en) 1987-03-09

Family

ID=11982690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1883877A Granted JPS53111594A (en) 1977-02-23 1977-02-23 Method of mounting workpiece on holder

Country Status (1)

Country Link
JP (1) JPS53111594A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615973A (en) * 1979-07-13 1981-02-16 Fujitsu Ltd Machining method for both faces of tiny thin leaf
JPS56166151U (en) * 1980-05-09 1981-12-09
JPH01107309A (en) * 1987-10-21 1989-04-25 Hitachi Ltd Lap surface table for magnetic head grinding device
JPH08329441A (en) * 1996-06-17 1996-12-13 Hitachi Ltd Polishing method of floating face of magnetic head slider
EP1020253A2 (en) * 1999-01-18 2000-07-19 Shin-Etsu Handotai Co., Ltd Polishing method for wafer and holding plate

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615973A (en) * 1979-07-13 1981-02-16 Fujitsu Ltd Machining method for both faces of tiny thin leaf
JPS56166151U (en) * 1980-05-09 1981-12-09
JPH01107309A (en) * 1987-10-21 1989-04-25 Hitachi Ltd Lap surface table for magnetic head grinding device
JPH08329441A (en) * 1996-06-17 1996-12-13 Hitachi Ltd Polishing method of floating face of magnetic head slider
EP1020253A2 (en) * 1999-01-18 2000-07-19 Shin-Etsu Handotai Co., Ltd Polishing method for wafer and holding plate
EP1020253A3 (en) * 1999-01-18 2001-05-23 Shin-Etsu Handotai Co., Ltd Polishing method for wafer and holding plate
US6402594B1 (en) 1999-01-18 2002-06-11 Shin-Etsu Handotai Co., Ltd. Polishing method for wafer and holding plate

Also Published As

Publication number Publication date
JPS6210779B2 (en) 1987-03-09

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