JPS531109B2 - - Google Patents

Info

Publication number
JPS531109B2
JPS531109B2 JP2090973A JP2090973A JPS531109B2 JP S531109 B2 JPS531109 B2 JP S531109B2 JP 2090973 A JP2090973 A JP 2090973A JP 2090973 A JP2090973 A JP 2090973A JP S531109 B2 JPS531109 B2 JP S531109B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2090973A
Other languages
Japanese (ja)
Other versions
JPS49110279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2090973A priority Critical patent/JPS531109B2/ja
Publication of JPS49110279A publication Critical patent/JPS49110279A/ja
Publication of JPS531109B2 publication Critical patent/JPS531109B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2090973A 1973-02-20 1973-02-20 Expired JPS531109B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2090973A JPS531109B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-02-20 1973-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2090973A JPS531109B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-02-20 1973-02-20

Publications (2)

Publication Number Publication Date
JPS49110279A JPS49110279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-10-21
JPS531109B2 true JPS531109B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-01-14

Family

ID=12040341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2090973A Expired JPS531109B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-02-20 1973-02-20

Country Status (1)

Country Link
JP (1) JPS531109B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6393490U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-12-10 1988-06-16

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642366A (en) * 1979-09-13 1981-04-20 Sony Corp Manufacture of semiconductor device
DE3138960A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verfahren zur erzeugung elektrisch leitender schichten

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6393490U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-12-10 1988-06-16

Also Published As

Publication number Publication date
JPS49110279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-10-21

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