JPS53108860U - - Google Patents

Info

Publication number
JPS53108860U
JPS53108860U JP1412977U JP1412977U JPS53108860U JP S53108860 U JPS53108860 U JP S53108860U JP 1412977 U JP1412977 U JP 1412977U JP 1412977 U JP1412977 U JP 1412977U JP S53108860 U JPS53108860 U JP S53108860U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1412977U
Other languages
Japanese (ja)
Other versions
JPS5758689Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977014129U priority Critical patent/JPS5758689Y2/ja
Publication of JPS53108860U publication Critical patent/JPS53108860U/ja
Application granted granted Critical
Publication of JPS5758689Y2 publication Critical patent/JPS5758689Y2/ja
Expired legal-status Critical Current

Links

JP1977014129U 1977-02-08 1977-02-08 Expired JPS5758689Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977014129U JPS5758689Y2 (enExample) 1977-02-08 1977-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977014129U JPS5758689Y2 (enExample) 1977-02-08 1977-02-08

Publications (2)

Publication Number Publication Date
JPS53108860U true JPS53108860U (enExample) 1978-08-31
JPS5758689Y2 JPS5758689Y2 (enExample) 1982-12-15

Family

ID=28833476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977014129U Expired JPS5758689Y2 (enExample) 1977-02-08 1977-02-08

Country Status (1)

Country Link
JP (1) JPS5758689Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0636346B2 (ja) * 1988-03-09 1994-05-11 セイコー電子工業株式会社 荷電粒子線装置及びこれによる試料観察方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574379U (enExample) * 1980-06-06 1982-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574379U (enExample) * 1980-06-06 1982-01-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device

Also Published As

Publication number Publication date
JPS5758689Y2 (enExample) 1982-12-15

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