JPS53108860U - - Google Patents

Info

Publication number
JPS53108860U
JPS53108860U JP1412977U JP1412977U JPS53108860U JP S53108860 U JPS53108860 U JP S53108860U JP 1412977 U JP1412977 U JP 1412977U JP 1412977 U JP1412977 U JP 1412977U JP S53108860 U JPS53108860 U JP S53108860U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1412977U
Other languages
Japanese (ja)
Other versions
JPS5758689Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977014129U priority Critical patent/JPS5758689Y2/ja
Publication of JPS53108860U publication Critical patent/JPS53108860U/ja
Application granted granted Critical
Publication of JPS5758689Y2 publication Critical patent/JPS5758689Y2/ja
Expired legal-status Critical Current

Links

JP1977014129U 1977-02-08 1977-02-08 Expired JPS5758689Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977014129U JPS5758689Y2 (enrdf_load_stackoverflow) 1977-02-08 1977-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977014129U JPS5758689Y2 (enrdf_load_stackoverflow) 1977-02-08 1977-02-08

Publications (2)

Publication Number Publication Date
JPS53108860U true JPS53108860U (enrdf_load_stackoverflow) 1978-08-31
JPS5758689Y2 JPS5758689Y2 (enrdf_load_stackoverflow) 1982-12-15

Family

ID=28833476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977014129U Expired JPS5758689Y2 (enrdf_load_stackoverflow) 1977-02-08 1977-02-08

Country Status (1)

Country Link
JP (1) JPS5758689Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0636346B2 (ja) * 1988-03-09 1994-05-11 セイコー電子工業株式会社 荷電粒子線装置及びこれによる試料観察方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574379U (enrdf_load_stackoverflow) * 1980-06-06 1982-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574379U (enrdf_load_stackoverflow) * 1980-06-06 1982-01-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device

Also Published As

Publication number Publication date
JPS5758689Y2 (enrdf_load_stackoverflow) 1982-12-15

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